First Nano's EasyTube™ 3000

The most advanced tool for the synthesis of nanotube...
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CVD's Fabricated Quartzware - Wafer Boats

Standard and customized wafer boats for various wafer sizes...
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Conceptronic's Reflow Ovens

Printed circuit board repair station designed for component rework...
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SDC - CiphercoN Auto Gas Cabinet

Safest and most reliable Ultra-High-Purity (UHP) specialty gas equipment...
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First Nano's EasyTube™ 2000

Turnkey solution for nanomaterial synthesis...
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CVD's Rapid Thermal Process Chamber

Infrared Heated Process Chamber...
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First Nano's EasyTube™ 6000
Offered for Carbon Nanotubes (CNT), Nanowires, Oxidation, Annealing,...
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EasyExhaust™ System

Provides proper handling of hazardous effluents from nanotechnology,s...
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CVD's Liquid Phase Epitaxial Reactor System

Provides optimum control over III-V and II-VI wafer processing...
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Rapid Thermal Processing - Chamber Lid

Infrared lamp array on the RTP chamber lid...
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First Nano's EasyTube™ 2000 - Hot Loader

Hot Loader to Load Sample into a Pre-Heated Chamber....
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SDC - Flexgas Mini Valve Manifold Box

Designed to cover a wide range of cylinder gas delivery application...
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CVD's LPCVD - End Cap Assembly

Seals the loading end of the process tube for both atmospheric and low pressure processes...
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LPCVD - Hot Wall Furnace Chamber

Boat of wafers loading into Hot Wall Furnace Chamber...
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UHVCVD - Multi-Chamber Cluster Tool

Used for the deposition of high-purity polysilicon...
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UHVCVD - Chamber Cluster Tool

Robotic wafer transfer system showing load lock and transfer chamber...
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UHVCVD - Chamber Cluster Tool - Quartz Holder

Substrate loaded onto quartz wafer holder and thermal baffle...
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PECVD - Process Chamber

Contains the RF Matching Unit delivering power to the upper electrode within...
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Metalorganic CVD System

For compound semiconductors material deposition...
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Multi-Chamber Cluster System

Consists of a load lock, transfer chamber, and up to 3 independent process modules...
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Cluster System- Sputter Etch Chamber

Sputter Etch chamber showing wafer platen and showerhead...
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Reel to Reel CVD System

Used for deposition of high quality films onto continuous flexible substrate material...
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Reel to Reel - Chamber with Multi-Zone Susceptor

Process chamber with multi-zone infrared susceptor heating system...
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Reel to Reel Processing - Hot Chamber

Flexible film being processed on an infrared heated susceptor...
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Reel to Reel Processing - Hot Chamber

Flexible film being processed on an infrared heated susceptor.
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Atomic Layer Deposition System - Process Chamber

Deposits ultra-thin uniform layers onto substrates...
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Atomic Layer Deposition System - Multi-head Chamber

Isolated Showerhead/Heater with ALD systems...
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Liquid Phase Epitaxial Reactor System - Loadlock

Loading tray to transfer to and from the glove box...
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Liquid Phase Epitaxial Reactor System - Inert Gas Spray Gun

Inert gas spray gun within glove box allows for surface cleaning...
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Liquid Phase Epitaxial Reactor System - 3 Zone Rolling Furnace

Rolling furnace in retracted system...
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Rapid Thermal Processing - Chamber

Provides extremely rapid heating and cooling of substrates...
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Rapid Thermal Processing - Infrared Lamp

Provides rapid and uniform heating...
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Rapid Thermal Processing - Single Wafer Cantilever Loading Station

Wafer on quartz loading arm being introduced into...
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Rapid Thermal Processing - Underpower Hot Process Chamber

Pyrolizing furnace and a water scrubbing system...
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Hydrogen Chloride Etching System

Gas control and delivery system for Hydrogen Chloride etching system...
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Quartz Shop - Custom Quartz Fabricated

Custom quartzware being fabricated using a high temperature lathe...
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Fabricated Quartzware - Quartz Shop

Flame polishing of quartz component to provide the proper finish...
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Bubbler/Flash Evaporator

Stainless Steel Bubbler/Flash Evaporator for delivering saturated gases to...
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Motion Control/Vacuum Chamber - Wafer Transfer Chamber

4 port UHV Wafer Transfer Chamber...
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Motion Control/Vacuum Chamber - Wafer Transfer Chamber & Sputter Etch Chamber

Bare wafer transfer/chamber...
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