Glossary
Glossary of Terms, Abbreviations, and Acronyms
| Abbreviations | Terms |
| AIN | Aluminum Nitride |
| ALD | Atomic Layer Deposition |
| CVI | Chemical Vapor Infiltration |
| GaAs EPI | Gallium Arsenide Epitaxy |
| GaN | Gallium Nitride |
| GaN HVPE | Gallium Nitride Halide Vapor Phase Epitaxy |
| HVPE | Halide Vapor Phase Epitaxy |
| LPE | Liquid Phase Epitaxy |
| MOCVD | Metal Organic Chemical Vapor Deposition |
| PECVD | Plasma Enhanced Chemical Vapor Deposition |
| PolyGaN | Polycrystalline Gallium Nitride |
| PVT | Physical Vapor Transport |
| RTP/RTA | Rapid Thermal Processing/Annealing |
| Si EPI | Silicon Epitaxial |
| Si QC | Silicon Precursor Quality Control |
| SiC EPI | Silicon Carbide Epitaxy |
| SiC PVT | Silicon Carbide Physical Vapor Transport |
| SiGe | Silicon-Germanium |
| UHVCVD | Ultra-High Vacuum Chemical Vapor Deposition |
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