Glossary of Terms, Abbreviations, and Acronyms

AINAluminum Nitride
ALDAtomic Layer Deposition
CVIChemical Vapor Infiltration
GaAs EPIGallium Arsenide Epitaxy
GaNGallium Nitride
GaN HVPEGallium Nitride Halide Vapor Phase Epitaxy
HVPEHalide Vapor Phase Epitaxy
LPELiquid Phase Epitaxy
MOCVD Metal Organic Chemical Vapor Deposition
PECVDPlasma Enhanced Chemical Vapor Deposition
PolyGaNPolycrystalline Gallium Nitride
PVTPhysical Vapor Transport
RTP/RTARapid Thermal Processing/Annealing
Si EPISilicon Epitaxial
Si QCSilicon Precursor Quality Control 
SiC EPISilicon Carbide Epitaxy
SiC PVTSilicon Carbide Physical Vapor Transport
UHVCVDUltra-High Vacuum Chemical Vapor Deposition
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