Rapid Thermal Processing/Annealing (RTP/A) Systems
CVD Equipment Corporation offers research and production of RTP and RTA systems for many applications including solar cells, graphene, carbon nanotubes, nanowires, LEDs, MEMS, semiconductors, and industrial coatings. RTP can be configured for oxidation, annealing, silicon dioxide, silicon nitride, contact alloying, tin oxide, GaAs implant activation, PSG and BPSG reflow, silicon dielectrics, and many other processes.
RTP/A System Features & Options
powered by CVDWinPrC™
Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.
The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.
High-Touch Customer Service, Including:
- Site Survey
- Installation Coordination and Field Acceptance
- NRTL/UL/CE Certification Available
- Initial Start-Up Support
- On-Site Training
- Warranty Response and Remote Capability
- Help Desk Support & Customized Service Contract Plans
- Continuous Improvement Programs and Support
- Customized Site Support Contracts
- Spares and Consumables
- Preventative Maintenance
- Site Personnel Contracts
Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
“enabling tomorrow’s technologies ™ ”