HVPE Systems

Hydride Vapor Phase Epitaxy (HVPE) Systems

HVPE is a high-rate deposition process for growing high-quality crystals. A common application is the production of gallium nitride (GaN) templates and bulk crystals. Gallium chloride is generated in situ via a chlorination reaction. The gallium chloride is then mixed with ammonia at the growth substrate at high temperatures to form the GaN crystal. Doping is achieved with fine control by introducing dopant gases and vapors. Dopants can also be chloride vapors generated in situ.

Substrate Rotation

 Improved deposition uniformity

Multi-zone furnace

Resistive or RF induction heated

HVPE50 System

Optional Glove Box

Loading station with optional nitrogen-purged glovebox

CVDWinPrC™ Software

Real-time process control, data logging, and recipe editing

Other III/V semiconductor crystals can be produced via HVPE, including indium phosphide (InP) and gallium arsenide (GaAs). Growth rates of epitaxial layers at up to ~ 300 µm/hr are readily achievable with HVPE.

Our HVPE systems can be configured for the particular requirements of the end user.


Configured for the growth of a range of doped and undoped III/V epitaxial crystals

Materials include GaN, GaAs, InP etc.

Dopant sources for doping the epilayer as it growth, with fast switching capability

Multi-zone furnace (resistive or RF induction heated)

Vertical process tube with pre-chambers for chlorination

Substrate rotation for improved deposition uniformity

Loading station with optional nitrogen-purged glovebox

Gas delivery cabinets

Exhaust gas treatment

CVDWinPrC™ system control software for real-time process control, graphing, data logging, and process recipe editing

Configured for the end user’s requirements

powered by CVDWinPrC

Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.

Safety Protocols

The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.


High-Touch Customer Service, Including:

  • Site Survey
  • Installation Coordination and Field Acceptance
  • NRTL/UL/CE Certification Available
  • Initial Start-Up Support
  • On-Site Training
  • Warranty Response and Remote Capability
  • Help Desk Support & Customized Service Contract Plans
  • Continuous Improvement Programs and Support
  • Customized Site Support Contracts
  • Spares and Consumables
  • Preventative Maintenance
  • Site Personnel Contracts
High Touch Customer Service
About Us

Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
enabling tomorrow’s technologies ™ ”