Cluster Tools

Cluster Tool Technology

The cluster tool system allows for the automatic transfer of a substrate between process modules via a transfer module to deposit different layers using different processes, or to process similar layers in parallel, without exposing the substrates to air before or after processing. Our proprietary Front End Loader module can accept individual wafers or cassettes of wafers and includes a dedicated pumping and purging system. A typical cluster tool configuration includes the Front End Loader, a transfer chamber, and several process chambers that can perform one or more processes. The substrates are transferred between chambers under a vacuum using a robotic arm.

CVD Equipment Corporation engineers and manufactures cluster tools to meet your process and throughput requirements. All chambers are integrated into a central control and safety system. Recipes are programmed and system control is automated through our proprietary real-time instrument control, data logging, graphing, and process editing software suite, CVDWinPrC™.

Cluster Tool

System Features & Options:

Front End Loader can accept individual wafers or cassettes

Transfer chamber with a robotic arm to maintain transfers under vacuum

Process chambers that can perform one or more processes

Vacuum system

Configured for a range of CVD processes, including:







Thermal Evaporation


CVDWinPrC™ based process control software for real-time process control, data logging and display, recipe generation, and editing

cluster tool injectors
cluster tool wafer feed
Cluster Tool Robotic Arm

The images shown are examples of many CVD systems we design and manufacture in-house for innovators working on next-generation processes and material development. We have customers worldwide at universities, governmental labs, start-ups, and Fortune 500 companies.

powered by CVDWinPrC

Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.

Safety Protocols

The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.


High-Touch Customer Service, Including:

  • Site Survey
  • Installation Coordination and Field Acceptance
  • NRTL/UL/CE Certification Available
  • Initial Start-Up Support
  • On-Site Training
  • Warranty Response and Remote Capability
  • Help Desk Support & Customized Service Contract Plans
  • Continuous Improvement Programs and Support
  • Customized Site Support Contracts
  • Spares and Consumables
  • Preventative Maintenance
  • Site Personnel Contracts
High Touch Customer Service
About Us

Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
enabling tomorrow’s technologies ™ ”