Physical Vapor Transport (PVT) Systems

High Performance, Precise Process Control, Robust Systems for Silicon Carbide PVT Crystal Growth

CVD Equipment Corporation supplies physical vapor transport systems to the silicon carbide (SiC) boule and wafer manufacturing industry. Our customers include some of the leading manufacturers of semiconductor wafers and devices. These manufacturers rely on our expertise and proven systems to meet their production needs and industrial challenges.

SiC Crystal Growth 150 & 200+ mm

Physical Vapor Transport (PVT) systems for the growth of 150 & 200+ mm diameter single crystal boules

High Temperature

RF Induction Heating up to 2500 °C

Enhanced Process Controls

Temperature Control +/-0.5°C @2500°C and Pressure Control +/-1%

Robust Production System

Low maintenance, ergonomic design

PVT150 Systems

Features & Benefits:

PVT systems for the growth of 150 & 200+ mm diameter single crystal boules

SiC Crystal Growth & Annealing

High Temperature, RF Induction Heating up to 2500°C

Automatic Crucible Load/Unload and Recipe Start

Crucible Stage Rotation for crystal growth uniformity

Automated Repositionable RF Coil with axial vertical travel allows for the control of thermal gradients and optimization of SiC crystal growth.

Pyrometer Temperature Controls maintain temperatures within half a degree

Motorized Pyrometer Alignment via Remote Control Box for real-time monitoring of crystal growth

Vacuum System with Atmospheric Bypass

Safety System: PLC, PC, and Relay Safety Systems

Manufacturing Enterprise System (MES) Compatible Integration

CVDWinPrC™ system control software for real-time process control, graphing, data logging, and process recipe editing

PVT150™ Brochure

View our PVT150™ Spec Sheet with Technical Data

PVT200™ Brochure

View our PVT200™ Spec Sheet with Technical Data

Through robust process controls, our tools achieve temperature and pressure stability throughout long growth runs. Precision temperature controls +/- 0.5°C and precision pressure controls +/- 1% facilitate the reliable production of low-defect SiC boules.

CVD Equipment Corporation can provide you with the highly engineered systems your organization needs to reliably produce high quality SiC boules required to keep up with critical high-volume manufacturing.

Our turnkey solutions have the latest safety innovations and a wide array of system features and benefits that will support your production, pilot and research and development needs. We offer 150 mm and 200+ mm crystal growth systems.

powered by CVDWinPrC

Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.

Safety Protocols

The systems have application-configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.


High-Touch Customer Service, Including:

  • Site Survey
  • Installation Coordination and Field Acceptance
  • NRTL/UL/CE Certification Available
  • Initial Start-Up Support
  • On-Site Training
  • Warranty Response and Remote Capability
  • Help Desk Support & Customized Service Contract Plans
  • Continuous Improvement Programs and Support
  • Customized Site Support Contracts
  • Spares and Consumables
  • Preventative Maintenance
  • Site Personnel Contracts
High Touch Customer Service
About Us

Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
enabling tomorrow’s technologies ™ ”