Silicon Precursor Quality Control Test Sample Manufacturing System
The Silicon Precursor Quality Control Test Sample Manufacturing System (SiQC) is designed to grow ultra-high-purity (intrinsic) monocrystalline silicon layers on a monocrystalline silicon substrate for qualifying feedstock for Polysilicon manufacturing facilities.
Our SiQC system provides optimum control over Silicon epitaxial thick film grown on the processing of float zone (FZ) wafers. A water-cooled, high-purity quartz process tube is offered to minimize tube deposits by keeping the quartz tube cool even during long deposition runs. Minimum tube deposits allow more runs between tube cleanings.
SiQC System Features & Options
powered by CVDWinPrC™
Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.
The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.
High-Touch Customer Service, Including:
- Site Survey
- Installation Coordination and Field Acceptance
- NRTL/UL/CE Certification Available
- Initial Start-Up Support
- On-Site Training
- Warranty Response and Remote Capability
- Help Desk Support & Customized Service Contract Plans
- Continuous Improvement Programs and Support
- Customized Site Support Contracts
- Spares and Consumables
- Preventative Maintenance
- Site Personnel Contracts
Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
“enabling tomorrow’s technologies ™ ”