Literature Downloads

CVD Equipment Corporation Downloads

View our online literature listed below.

PVT200™ Spec Sheet

The PVT200 system is designed to produce silicon carbide (SiC) crystal boules through physical vapor transport (PVT). In this process, polycrystalline silicon carbide (SiC) undergoes sublimation at high temperatures up to 2,500°C. To achieve the required temperatures, an RF Induction Heating Coil is used for inductive heating in the kilohertz range. The automated positionable coil with axial vertical travel allows for the control of thermal gradients and to optimize SiC growth.

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CVD Equipment Production Systems Catalog

(includes our portfolio of CVD production systems for industrial coatings, the markets we serve, and our core technologies.)

CVD Equipment Production Systems Product Sheets

PVT150™ – Physical Vapor Transport Systems
Chemical Vapor Infiltration Systems
Liquid Phase Epitaxial Systems
Reel-to-Reel (Roll-to-Roll) CVD Processing

Capabilities Brochures

Functional Coatings Capabilities
Fabricated Quartzware Capabilities

FirstNano® R&D Product Catalog

(includes R&D CVD process systems, gas delivery & abatement systems, and all standard system features & process capabilities configuration tables)

FirstNano® R&D CVD Process System Product Sheets

EasyTube® 101 Budget Friendly CVD System (25 mm x 50 mm)
EasyTube® 2000 CVD System (50 mm x 50 mm)
EasyTube® 3000 CVD/Annealing Process System (150 mm x 150 mm)
EasyTube® 6000 Multi-Tube Horizontal Furnace System (3 or 4 process tubes)

Application/Process Development Capabilities Brochures

Graphene Capabilities
Metal Organic CVD Capabilities

For information on our systems process capabilities and configurations, please refer to the FirstNano® R&D Product Catalog above.

Exhaust Gas Conditioning System Product Sheets

EGC Wet Scrubber
EGC Pyrolizer + Wet Scrubber

About Us

Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
enabling tomorrow’s technologies ™ ”