Ceramic Matrix Composites

Ceramic Matrix Composites Systems

CVD Equipment Corporation supplies process equipment for Ceramic Matrix Composites (CMCs) for both product development or production. CVD Equipment Corporation has decades of experience in providing continuous reel to reel, web coating, or batch processing chemical vapor infiltration and deposition systems for CMCs.

About CMCs

CMCs are lightweight, high-temperature, corrosion-resistant materials that are displacing high nickel superalloys in certain applications. In aircraft engines, CMCs can run hotter, leading to more fuel efficiency and fewer pollutants. The fuel and maintenance cost savings to commercial air carriers can be substantial. In industrial power turbines, the higher temperature operation of CMC materials leads to a reduction of both emissions and the cost of electricity.


Continuous Substrate Systems

Our deposition and infiltration systems for the development and production of CMCs deposit a wide range of materials, including nitrides, carbides, and carbon nanostructures. One example is a continuous production process for chemical vapor infiltration of silicon-doped boron nitride onto individual filaments of multiple parallel processed silicon carbide fiber tows. The Si-doped BN is used as an interphase to control the fiber-matrix bonding and transfer load between the fiber and the matrix in such a way that prevents the brittle fracturing of the CMCs. More technical information about interphase fiber coatings can be found here: https://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/20050179368.pdf

CMC System
CMC System
CMC System

Fixed Substrate Systems

Our deposition systems also deposit functional coatings onto finished CMC parts. We use a low-pressure high-temperature CVD process to deposit a uniform, conformal, high-purity, dense coating on a 3D-shaped part. Our multi-chamber systems can increase production throughput by processing multiple chambers in parallel or sequentially. An example of where our equipment is used is in depositing a silicon layer onto a CMC part for aircraft engines. The silicon layer helps to protect the underlying CMC part from oxidation. To round off our capability, we also provide gas delivery and exhaust treatment systems that integrate with the deposition system to achieve a turnkey operation.

System Features & Options:

As a part of our product line, CVD Equipment Corporation supplies continuous (reel to reel, web coating) fiber coating systems that are used in the process development and production of CMCs. Our proprietary technology includes:

Atmospheric or low-pressure roll-to-roll and fixed substrate processing systems

Process temperatures >1400 °C

High Temperature, RF Induction Heating up to 2500°C

De-spool and spool modules with drive motors that are isolated from the process environment

Intelligent Unwind and Wind – optical sensing and automatic linear actuated positioning for aligning the payout from the bobbins to minimize rubbing/abrasion during payout and spooling.

Productivity support with tailored service contracts

Low tension closed-loop control – automatic feedback control of tension down to 10 grams

Parallel processing of multiple spools

Multiple process chambers operating in parallel or in sequence to increase production throughput

Full system integration, including fiber handling, deposition chambers, vacuum systems, process gas delivery systems, exhaust gas conditioning systems, and safety & controls systems

Real-time data logging and graphing

powered by CVDWinPrC™

Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.

Safety Protocols

The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.


High-Touch Customer Service, Including:

  • Site Survey
  • Installation Coordination and Field Acceptance
  • NRTL/UL/CE Certification Available
  • Initial Start-Up Support
  • On-Site Training
  • Warranty Response and Remote Capability
  • Help Desk Support & Customized Service Contract Plans
  • Continuous Improvement Programs and Support
  • Customized Site Support Contracts
  • Spares and Consumables
  • Preventative Maintenance
  • Site Personnel Contracts
High Touch Customer Service
About Us

Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
enabling tomorrow’s technologies ™ ”