Dynamic Hotzone Temperature Control™ (DHTC)

Yield Improvement within Run, Run-to-Run, System-to-System Repeatability by Optimized Temperature Measurement and Control for PVT Systems

Dynamic Hotzone Temperature Control (DHTC™) for 200 mm & 150 mm SiC Crystal Growth

Yield Enhancement

for SiC Crystal Growth

Minimizing Impact of Misalignment

from Hotzone Degradation, Assembly, & Loading

DHTC™ is Patent Pending

Video Processing Software

& Mechanical Hardware

Temperature Measurement Consistency

for 200 mm & 150 mm SiC PVT Systems

Dynamic Hotzone Temperature Control™ is an option that addresses some of the temperature dependent contributors to yield loss.

DHTC™ combines video processing software & mechanical hardware for tracking the center of rotation, position of crucible viewport, and pyrometer alignment to determine, record, and compensate for misalignment of the hotzone for optimized temperature control.

DHTC™ ensures consistent temperature measurement and control during SiC boule growth and run-to-run & system to system repeatability.

DHTC™ Inactive

DHTC™ Activated

Real time position tracking of pyrometer and hotzone center to record misalignment.

Precise temperature measurements at the center of viewport.

The actual temperature is 7 ^oC lower due to the misalignment, contributing to boule yield loss without DHTC™

DHTC™ Features & Options

Improved within Process Run, Run-to-Run & System-to-System Temperature Measurement Consistency for 200 mm & 150 mm SiC Physical Vapor Transport Systems

Video Processing Software & Mechanical Hardware for Temperature Measurement Accuracy Dynamic Temperature Measurement Position Tracking

Automated Pyrometer Tracking & Alignment to Hotzone

Offered as an Integration Option for CVDE’s PVT200™

An Integration Option Offered for Your Existing PVT System

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Offered on all of CVDE’s PVT systems and also can be integrated with in-house manufactured PVT systems. Learn how DHTC™ has the potential to improve yield and system fleet productivity.