Dynamic Hotzone TemperatureControl™ (DHTC)
Yield Improvement within Run, Run-to-Run, System-to-System Repeatability by Optimized Temperature Measurement and Control for PVT Systems
Dynamic Hotzone Temperature Control (DHTC™) for 200 mm & 150 mm SiC Crystal Growth
Yield Enhancement
for SiC Crystal Growth
Minimizing Impact of Misalignment
from Hotzone Degradation, Assembly, & Loading
Video Processing Software
& Mechanical Hardware
Temperature Measurement Consistency
for 200 mm & 150 mm SiC PVT Systems
Dynamic Hotzone Temperature Control™ is an option that addresses some of the temperature dependent contributors to yield loss.
DHTC™ combines video processing software & mechanical hardware for tracking the center of rotation, position of crucible viewport, and pyrometer alignment to determine, record, and compensate for misalignment of the hotzone for optimized temperature control.
DHTC™ ensures consistent temperature measurement and control during SiC boule growth and run-to-run & system to system repeatability.
DHTC™ Inactive
DHTC™ Active
Real time position tracking of pyrometer and hotzone center to record misalignment.
Precise temperature measurements at the center of viewport.
The actual temperature is 7 oC lower due to the misalignment, contributing to boule yield loss without DHTC™
DHTC™ Features & Options
Improved within Process Run, Run-to-Run & System-to-System Temperature Measurement Consistency for 200 mm & 150 mm SiC Physical Vapor Transport Systems
Video Processing Software & Mechanical Hardware for Temperature Measurement Accuracy Dynamic Temperature Measurement Position Tracking
Automated Pyrometer Tracking & Alignment to Hotzone
Offered as an Integration Option for CVDE’s PVT200™
An Integration Option Offered for Your Existing PVT System
Offered on all of CVDE’s PVT systems and also can be integrated with in-house manufactured PVT systems. Learn how DHTC™ has the potential to improve yield and system fleet productivity.
DHTC™ Application Note
View our DHTC™ Application Note with Technical Data
DHTC™ Brochure
View our DHTC™ brochure for more information
High-Touch Customer Service, Including:
- Site Survey
- Installation Coordination and Field Acceptance
- NRTL/UL/CE Certification Available
- Initial Start-Up Support
- On-Site Training
- Warranty Response and Remote Capability
- Help Desk Support & Customized Service Contract Plans
- Continuous Improvement Programs and Support
- Customized Site Support Contracts
- Spares and Consumables
- Preventative Maintenance
- Site Personnel Contracts
About Us
Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
“enabling tomorrow’s technologies ™ ”