CVI 200™

Work Zone up to 11″ ID & 10″ H

For parts up to 8″ D & 10″ H

Substrate Rotation

Improved Deposition Uniformity

3 Zone Resistance Furnace

Independent zone temperature control

Thermal Processing Up to 1600 °C

Temperature uniformity less than +/- 5 °C

Low Pressure Operation

Operating pressure 5 to 500 Torr

Internal Chlorinators

Up to three internal chlorinators 

CVD Equipment Corporation’s CVI 200™ allows for the infiltration of CMC preforms as well as the deposition of ultra-high temperature ceramic (UHTC) coatings. UHTC coatings are a category of materials exhibiting some of the highest temperature melting points. The materials are designed to operate in extreme environments where conventional monolithic ceramics and metals would fail due to extreme heat and oxidation conditions, and have many applications including aerospace and defense, and hypersonics.

The CVI 200™ can be configured to enable the deposition of UHTC coatings onto C/C and SiC/SiC CMCs with a variety of precursors materials, including silicon carbide (SiC), silicon nitride (Si₃N₄), boron nitride (BN), silicon boron nitride (SiBN), boron carbide (B₄C), pyrolytic carbon (C), halfnium carbide (HfC), hafnium diboride (HfB₂), zirconium carbide (ZrC), and zirconium diboride (ZrB₂).

Offering precise temperature uniformity control, process pressure, gas flows, and substrate rotation, the CVI 200™ infiltrates and deposits coatings with uniform thickness over complex 3D shapes.

CVI 200™ Features & Benefits:

Three zone resistance furnace with independent zone temperature control

Graphite retort & heating elements

Stainless steel double wall, water cooled vacuum chamber

Up to three internal chlorinators 

Workpiece rotation 1- 20 rpm

Gas preheat & mixing zone

Internal pyrolyzer

Heated exhaust line

Cold trap for ammonium chloride byproducts

Exhaust gas conditioning system with closed loop pH control and recirculation

Optional gas/liquid delivery system

Hazardous gas leak detection and alert systems

Liquid Abatement Neutralization Systems

Wet Scrubber for Corrosive Gas Abatement

Closed loop pH control system

Recirculation system

Overflow tank system

100 Gallon Tank

powered by CVDWinPrC™

Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.

Safety Protocols

The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.

High-Touch Customer Service, Including:

• Site Survey
• Installation Coordination and Field Acceptance
• NRTL/UL/CE Certification Available
• Initial Start-Up Support
• On-Site Training
• Warranty Response and Remote Capability
• Help Desk Support & Customized Service Contract Plans
• Continuous Improvement Programs and Support
• Customized Site Support Contracts
• Spares and Consumables
• Preventative Maintenance
• Site Personnel Contracts