Physical Vapor Transport (PVT) Systems
High Performance, Precise Process Control, Robust Systems for Silicon Carbide PVT Crystal Growth
CVD Equipment Corporation supplies physical vapor transport systems to the silicon carbide (SiC) boule and wafer manufacturing industry. Our customers include some of the leading manufacturers of semiconductor wafers and devices. These manufacturers rely on our expertise and proven systems to meet their production needs and industrial challenges.
SiC Crystal Growth 150 & 200+ mm
Physical Vapor Transport (PVT) systems for the growth of 150 & 200+ mm diameter single crystal boules
High Temperature
RF Induction Heating up to 2500 °C
Enhanced Process Controls
Temperature Control +/-0.5°C @2500°C and Pressure Control +/-1%
Robust Production System
Low maintenance, ergonomic design
Features & Benefits:
PVT systems for the growth of 150 & 200+ mm diameter single crystal boules
SiC Crystal Growth & Annealing
High Temperature, RF Induction Heating up to 2500°C
Automatic Crucible Load/Unload and Recipe Start
Crucible Stage Rotation for crystal growth uniformity
Automated Repositionable RF Coil with axial vertical travel allows for the control of thermal gradients and optimization of SiC crystal growth.
Pyrometer Temperature Controls maintain temperatures within half a degree
Motorized Pyrometer Alignment via Remote Control Box for real-time monitoring of crystal growth
Vacuum System with Atmospheric Bypass
Safety System: PLC, PC, and Relay Safety Systems
Manufacturing Enterprise System (MES) Compatible Integration
CVDWinPrC™ system control software for real-time process control, graphing, data logging, and process recipe editing
PVT150™ Brochure
View our PVT150™ Spec Sheet with Technical Data
PVT200™ Brochure
View our PVT200™ Spec Sheet with Technical Data
Through robust process controls, our tools achieve temperature and pressure stability throughout long growth runs. Precision temperature controls +/- 0.5°C and precision pressure controls +/- 1% facilitate the reliable production of low-defect SiC boules.
CVD Equipment Corporation can provide you with the highly engineered systems your organization needs to reliably produce high quality SiC boules required to keep up with critical high-volume manufacturing.
Our turnkey solutions have the latest safety innovations and a wide array of system features and benefits that will support your production, pilot and research and development needs. We offer 150 mm and 200+ mm crystal growth systems.
NEW Dynamic Hotzone Temperature Control™ (DHTC) Option
Yield Improvement within Run, Run-to-Run, System-to-System Repeatability by Optimized Temperature Measurement and Control for PVT Systems
DHTC™ combines video processing software & mechanical hardware for tracking the center of rotation, position of crucible viewport, and pyrometer alignment to determine, record, and compensate for misalignment of the hotzone for optimized temperature control.
powered by CVDWinPrC™
Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.
Safety Protocols
The systems have application-configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.
High-Touch Customer Service, Including:
- Site Survey
- Installation Coordination and Field Acceptance
- NRTL/UL/CE Certification Available
- Initial Start-Up Support
- On-Site Training
- Warranty Response and Remote Capability
- Help Desk Support & Customized Service Contract Plans
- Continuous Improvement Programs and Support
- Customized Site Support Contracts
- Spares and Consumables
- Preventative Maintenance
- Site Personnel Contracts
About Us
Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
“enabling tomorrow’s technologies ™ ”