BondCoat™ Systems
CVD BondCoat™ Systems
Silicon Bond Coat Production Systems for applying a silicon layer to 3D surfaces and varying components using chemical vapor deposition.
CVD BondCoat™ System Features & Benefits:
Uniform Silicon Coating (uniform polycrystalline silicon layer onto 3D surfaces)
Up to three Chambers with Single Part Sequential Processing
Multiple gas injectors with independent flow control for thickness uniformity
Capable of direct liquid injection, bubbler source injection, and vapor/gas delivery
Automatic or manually sequenced system for optimum control over deposition (typical component dimensions 4.75″ diameter, 7.5″ tall, customizable)
Substrate Rotation for improved deposition uniformity
Vertical Process Tubes
Single or Multi-zone Furnace (Resistive or RF induction heated)
– Temperatures up to 2200° C
Robust Production System with Enhanced Process Controls
– Temperature Control +/- 0.5° C
– Pressure controls +/- 1%
Optional Gas Delivery Cabinets
Exhaust Gas Scrubber (EGS)
Designed for ease of maintenance
MES Compatible
CVDWinPrC™ system control software for real-time process control, graphing, data logging, and process recipe editing
powered by CVDWinPrC™
Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.
Safety Protocols
The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.
High-Touch Customer Service, Including:
- Site Survey
- Installation Coordination and Field Acceptance
- NRTL/UL/CE Certification Available
- Initial Start-Up Support
- On-Site Training
- Warranty Response and Remote Capability
- Help Desk Support & Customized Service Contract Plans
- Continuous Improvement Programs and Support
- Customized Site Support Contracts
- Spares and Consumables
- Preventative Maintenance
- Site Personnel Contracts
About Us
Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
“enabling tomorrow’s technologies ™ ”