RTP/RTA Systems

Rapid Thermal Processing/Annealing (RTP/A) Systems

CVD Equipment Corporation offers research and production of RTP and RTA systems for many applications including solar cells, graphene, carbon nanotubes, nanowires, LEDs, MEMS, semiconductors, and industrial coatings. RTP can be configured for oxidation, annealing, silicon dioxide, silicon nitride, contact alloying, tin oxide, GaAs implant activation, PSG and BPSG reflow, silicon dielectrics, and many other processes.

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RTP/A System Features & Options

Atmospheric and reduced pressure systems to process wafers and large panels

Single and multi-zone systems using orthogonal linear, parallel linear or axisymmetrical infrared lamps

Process temperatures from 400 °C > 1300 °C

Fast response and low thermal mass allow temperature ramping > 100 °C /second

Automatic microprocessor control systems

CVDWinPrC™ system control software for real-time process control, data logging, and recipe editing

Atmospheric (APCVD), Low Pressure (LPCVD), and Ultra High Vacuum (UHVCVD) operations are available.

High-purity gas controls feature 316 L stainless steel orbital welded gas lines, VCR connections, mass flow controllers, sub-micron filtration, air-operated valves and inject/run manifolds

Stainless steel, water-cooled, O-ring sealed end cap assembly mates with the high purity quartz tube or axially symmetric chamber. Systems have dedicated gas injectors and a positive exhaust line

High vacuum load lock available

Glossary

powered by CVDWinPrC™

Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.

Safety Protocols

The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.

CVDWinPrC™

High-Touch Customer Service, Including:

  • Site Survey
  • Installation Coordination and Field Acceptance
  • NRTL/UL/CE Certification Available
  • Initial Start-Up Support
  • On-Site Training
  • Warranty Response and Remote Capability
  • Help Desk Support & Customized Service Contract Plans
  • Continuous Improvement Programs and Support
  • Customized Site Support Contracts
  • Spares and Consumables
  • Preventative Maintenance
  • Site Personnel Contracts
High Touch Customer Service
About Us

Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
“enabling tomorrow’s technologies ™ ”

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