SAS Systems

Selenization and Sulfurization Systems

Our SAS process systems use thermal treatment (either infrared or resistance) with precursors such as diethyl selenide and hydrogen sulfide. The SAS process is used commercially in the solar industry for CIGS, CIS, and CIGSeS thin film solar module production. Surfaces are controllably converted into either a selenide or sulfide compound.

CVD SAS System

SAS System Features & Options

Argon glove box for handling air-sensitive substrates

Computer control system

Six (6) gas lines with individual flow rate controls

Static mixer for optimum gas mixing

Integrated vacuum control system for operation from 1 to 740 Torr and pump-down of a clean and dry chamber to a base pressure of <50 mTorr

CVDWinPrC™ system control software for real-time process control, data logging, and recipe editing

Process temperature – up to 700 °C at >20 °C per second

Safety control system

Gas leak detection

Low-pressure vapor delivery system of diethyl selenide liquid precursor

Solid source selenization using a closed box and an independent Selenium source heater

Exhaust gas conditioning system with sodium hydroxide (NaOH) re-circulation system with pH monitoring

powered by CVDWinPrC™

Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.

Safety Protocols

The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.


High-Touch Customer Service, Including:

  • Site Survey
  • Installation Coordination and Field Acceptance
  • NRTL/UL/CE Certification Available
  • Initial Start-Up Support
  • On-Site Training
  • Warranty Response and Remote Capability
  • Help Desk Support & Customized Service Contract Plans
  • Continuous Improvement Programs and Support
  • Customized Site Support Contracts
  • Spares and Consumables
  • Preventative Maintenance
  • Site Personnel Contracts
High Touch Customer Service
About Us

Over 40 years of expertise in CVD and thermal process equipment design and manufacturing.
enabling tomorrow’s technologies ™ ”