CVD 4000™

Work Zone: up to 42″ ID and 60″ H

Graphite retort & heating elements

Five Zone Temperature Control

Operating temperature up to 1600 °C

Substrate Rotation

Improved Deposition Uniformity

Thermal Processing up to 1600 °C

Heating Rate >10 °C per min

Low Pressure Operation

Operating pressure 7 to 10 Torr

The CVD 4000™ system supports a wide range of applications including industrial coatings, aerospace & defense, and nuclear. It has a large-scale industrial CVD reactor featuring a work zone with an internal diameter of up to 42 inches and a height up to 60 inches. The system is capable of operating at temperatures up to 1600 °C.

This system’s furnace is comprised of 5 zones which are individually controllable and each have a power rating of 100 kW. The reactor can operate at controlled pressures from 50 Torr to 700 Torr, and is equipped with two pumps; one for initial chamber evacuation to base pressure, and one which is process-compatible.

The CVD 4000™ has a gas management system which is responsible for delivering gas and vapor to the reactor in a controllable and safe manner. The system is also equipped with optional dual endcap functionality for reduced time between process loads, and a shuttle system for payload transport.

CVD 4000™ Features & Benefits:

Five zone furnace with independent zone temperature control

Temperature uniformity better than +/- 5 °C

Graphite retort & heating elements

Heating ramp rate >10 °C per min

High rate of deposition for SiC coatings

Substrate rotation for improved deposition uniformity

Furnace cooldown in less than 12 hrs

Stainless steel double wall, water cooled vacuum chamber

Controllable rotation speed from 0.25 to 5 rpm

Gas preheat & mixing zone

Internal pyrolizer

Dual loading stations

Shuttle cart

Control Cabinets

• DC compartment with PLC control, PC and UPS
• Hardware interlocks for critical alarms (EMO)
• PLC software interlocks for other alarms
• AC compartment with VFD control for lift and shuttle motion and rotation

GMS Cabinets

• Engineered for safe handling of flammable and corrosive gases, liquids, and vapors
• Advanced mass flow controllers and meters for precise gas flow management
• Robust liquid flow controllers and meters for controlled liquid delivery
• Internal vaporizers and heated lines designed for safe, stable vapor precursor handling

Loading Station with Shuttle Cart

Floor mounted track assembly to move endcaps through the CVD 4000™ system for payload transport from loading station, cooling station, and lift station into the reactor.

Process Chamber

• Graphite felt insulation
• Bottom gas injection
• Top exhaust
• Exhaust gas heat exchanger
• Heated exhaust line and valves to prevent pyrophoric byproduct condensation
• Liquid ring process pump with non-process dry screw roughing pump process chamber

powered by CVDWinPrC™

Powered by our CVDWinPrC™ process control software, the systems automatically log data and graphically show time-dependent values of user-selected parameters. CVDWinPrC™ also allows users to load preprogrammed recipes, modify, check, and create new recipes, and view real-time or saved process data.

Safety Protocols

The systems have application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.

High-Touch Customer Service, Including:

• Site Survey
• Installation Coordination and Field Acceptance
• NRTL/UL/CE Certification Available
• Initial Start-Up Support
• On-Site Training
• Warranty Response and Remote Capability
• Help Desk Support & Customized Service Contract Plans
• Continuous Improvement Programs and Support
• Customized Site Support Contracts
• Spares and Consumables
• Preventative Maintenance
• Site Personnel Contracts